FABRICATION OF PIEZOELECTRIC BIMORPH USING LEAD ZIRCONATE TITANATE THIN FILM DEPOSITED BY HYDROTHERM

来源 :机械工程学报(英文版) | 被引量 : 0次 | 上传用户:yingluoyuchen
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
In order to describe the characteristics of piezoelectric bimorph, properties of lead zirconate titanate (LZT) film are studied by X-ray diffraction (XRD) and scanning eletron microscope (SEM). The ratio of PbTiO3/PbZrO3 in LZT is 53/47, which is around morphotropic phase boundary (MPB). LZT film is composed of cubic particles with the average size of 5 μm. Density of thin film is figured out through the datum measured in experiments. The displacement model used to analyze the driving ability of bimorph is set up, and the effect of elastic intermediate layer is taken into account. Piezoelectric coefficient of LZT film is worked out by using the displacement model. Experiments of driving ability show that deformation of bimorph free end does not increase with times of crystal growth processes and the maximum deformation is obtained after two times crystal growth processes. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.
其他文献
Density functional theory (DFT) B3LYP at 6-31G* level is employed to optimize the structures of the molecules bridged through n-vertex bis-substituted carborane
In many experiments, the performance of a subject may be affected by some previous treatments applied to it apart from the current treatment. This motivates the
In order to compare the dosimetric properties of two kinds of solid state detectors used for monitoring external exposures,experiments Were performed for the GD
This paper aims to present an adaptive control scheme for the synchronization of two classes of uncertain neural networks with different attractors. A new suffi
The invariant sets and the solutions of the 1+2-dimensional generalized thin film equation are discussed. It is shown that there exists a class of solutions to
Amphiphilic ODA/HY and ODA/ Hβ zeolites have been prepared via chemically coating octadecylamine (ODA) with alcohol as solvent. IR and titrimetric results indi
A high etch rate GaAs via-hole process was studied in an inductively coupled plasma system using Cl2/BCl3 gas system. The effects of process parameters on the G
An intensity-based non-rigid registration algorithm is discussed, which uses Gaussian smoothing to constrain the transformation to be smooth, and thus preserves
提出了一种在高海拔通过测量直达质子来确定质子和空气核(p—air)的非弹性作用截面的方法.并通过Monte Carlo模拟,研究了其可行性.假定将一台类似于KASCADE的强子量能器设置在西藏
The in-line response of a vertical flexibly mounted cylinder in regular and random waves is reported. Both theoretical analyses and experimental measurements ha