本文介绍了一种可以在高温条件下工作的压力传感器。这种以兰宝石材料为感压膜片的压力传感器,由于其应变电阻是外延在绝缘性能良好的兰宝石材料上的,所以这种传感器耐高温,适合在高温条件下使用。传感器的主要技术指标为,量程0—0.6mPa,0—1.0mPa,使用温度为0—300℃,最高可达465℃。精度优于0.5%F.S。这种传感器已于八六年十二月在沈阳通过部级鉴定。 This article describes a pressure sensor that can operate at high temperatures. This kind of pressure sensor with sapphire material as pressure-sensing diaphragm, because of its strain resistance is epitaxial on the insulation properties of sapphire material, so this sensor is high temperature, suitable for use under high temperature conditions. The main sensor specifications, range 0-0.6mPa, 0-1.0mPa, the use of temperature is 0-300 ℃, up to 465 ℃. Accuracy better than 0.5% F.S. This sensor passed the ministry-level appraisal in Shenyang in December of 1986.