论文部分内容阅读
减薄CdS窗口层是提高CdS/CdTe太阳电池转换效率的有效途径之一,减薄窗口层会对器件造成不利的影响,因此在减薄了的窗口层与前电极之间引入过渡层非常必要.利用反应磁控溅射法在前电极SnO2:F薄膜衬底上制备未掺杂的SnO2薄膜形成过渡层,并将其在N2/O2=4:1,550℃环境进行了30min热处理,利用原子力显微镜、X射线衍射仪、紫外分光光度计对复合薄膜热处理前后的形貌、结构、光学性能进行了表征,同时分析了复合薄膜的电学特性.结果表明,未掺杂的SnO2薄膜没有出现异相的谱线,并且(110)择优取向,与衬底具有相同的结构,复合薄膜界面无晶格失配;退火后,复合膜更加均匀致密,表面更加规则,平整,光洁;薄膜电阻增大,满足阻挡层的要求,具有良好的电学均匀性和大于80%的透过率.最终制备出适合用作CdS/CdTe太阳电池前电极的SnO2:F/SnO2复合薄膜。
Thinning the CdS window layer is one of the effective ways to improve the conversion efficiency of the CdS / CdTe solar cell. Thinning the window layer will adversely affect the device. Therefore, it is very necessary to introduce a transition layer between the thinned window layer and the front electrode An undoped SnO2 thin film was formed on the front electrode SnO2: F thin film substrate by reactive magnetron sputtering to form a transition layer, which was heat treated in N2 / O2 = 4: 1,550 ℃ environment for 30min. The atomic force microscopy , X-ray diffractometer and UV spectrophotometer were used to characterize the morphology, structure and optical properties of the composite films before and after heat treatment. The electrical properties of the composite films were also analyzed. The results show that the undoped SnO2 thin films do not appear heterogeneous (110) preferred orientation, and the substrate has the same structure, the composite film interface without lattice mismatch; annealed, the composite film is more uniform and dense, the surface more regular, smooth, smooth; film resistance increases, to meet Barrier layer has good electrical uniformity and transmittance of more than 80%, finally prepared suitable for CdS / CdTe solar cell front electrode SnO2: F / SnO2 composite film.