论文部分内容阅读
本文介绍了用于测量微小压力或流速的硅杯型集成传感器。它将敏感元件与信号放大电路以及恒流供电电路都集成在同一芯片内,实现了硅杯型压力传感器的单片集成。该集成传感器有较小的体积和较高的灵敏度,可用于测量小区域内的压力及流速分布情况。
This article describes a silicon cup integrated sensor for measuring small pressures or flow rates. It will be sensitive components and signal amplification circuit and constant current power supply circuit are integrated in the same chip, to achieve a silicon cup pressure sensor monolithic integration. The integrated sensor has a smaller volume and higher sensitivity, can be used to measure pressure and flow distribution within a small area.