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利用射频/直流磁控溅射法,制备了316L 不锈钢/SiO_2(Al_2O_3)复合膜,研完了薄膜的组织和形貌,测试了薄膜的显微硬度和耐磨性。结果表明,溅射316L 不锈钢薄膜和316L/SiO_2(Al_2O_3)复合薄膜都呈柱状晶结构.主要由Fe-Cr 和γ-Fe 相构成;溅射316L 不锈钢薄膜在 Fe-Cr(110)晶面出现明显的择优取向;由于射频溅射陶瓷的掺合.使316L 不锈钢/陶瓷复合薄膜柱状晶细化.并出现二次柱状晶,在 Fe-Cr(211)晶面出现明显的择优取向.尽管316L 不锈钢/陶瓷复合膜的显微硬度相对于磁控溅射316L 薄膜提高不大,但其抗磨损性能明显提高,以316L/Al_2O_3复合膜尤为显著。
A 316L stainless steel / SiO_2 (Al_2O_3) composite film was prepared by RF / DC magnetron sputtering. The microstructure and morphology of the film were investigated. The microhardness and wear resistance of the film were tested. The results show that the sputtered 316L stainless steel film and the 316L / SiO_2 (Al_2O_3) composite film have columnar crystal structure, mainly composed of Fe-Cr and γ-Fe phases; sputtered 316L stainless steel film appears on the Fe-Cr Obvious selectivity orientation was observed in the Fe-Cr (211) crystal plane due to the combination of RF sputtering ceramics. The columnar grains of 316L stainless steel / ceramic composite thin films were thinned and the secondary columnar crystals appeared. The microhardness of the stainless steel / ceramic composite film has little improvement compared with the magnetron sputtering 316L film, but its wear resistance is obviously improved, especially 316L / Al 2 O 3 composite film.