本文介绍了采用CO_2激光光声光谱检测硅烷、磷烷及硼烷的意义、测试装置及方法,为采用TEACO_2激光器提纯硅烷提供了必要的光谱数据。 硅烷作为太阳能电池的原料,它含有Ⅲ族和Ⅴ族元素的挥发物质磷烷、砷烷及硼烷等。要提高太阳能电池的效率或使大多数半导体器件的制作获得成功,就需要超高纯度的原料。采用常规的方法,需要对提纯的物质都要经过同样的程序,而激光提纯的方法其独特之处就在于激光只作用于杂质上,而留下所需要的硅烷事实上不发生变化。当前,国外大多采用紫外ArF激光器对硅烷进行提纯,尚未见到利用CO_2激光器进行提纯的报导。但是,由于CO_2激光器具有功率大、性能稳定及容易制造等特点,因此,采用CO_2激光器提纯硅烷将具有更大的意义。 This paper introduces the significance, testing equipment and methods for the determination of silane, phosphorane and borane by CO_2 laser photoacoustic spectroscopy. It provides the necessary spectral data for the purification of silane with TEACO_2 laser. Silane as a solar cell raw materials, it contains the group III and group V volatile substances phosphorus alkanes, arsine and borane. To increase the efficiency of solar cells or to make most semiconductor devices successful, ultra-high purity raw materials are required. Conventional methods require that the purified material be subjected to the same procedure, and the laser purification method is unique in that the laser acts only on the impurities, leaving the desired silanes virtually unchanged. At present, foreign countries mostly adopt ultraviolet ArF laser to purify silane, and no reports of using CO2 laser to purify have been reported yet. However, due to CO 2 laser has the characteristics of large power, stable performance and easy to manufacture, therefore, the use of CO 2 laser purifier silane will have greater significance.