论文部分内容阅读
设计了一种基于静电悬浮原理的微机械加速度计。它采用三明治结构的微敏感元件,电容式位移检测方案及静电力悬浮控制方案。着重对敏感元件的主要结构设计、参数的选取、支承静电力的计算以及量程极限、精度极限等问题进行了分析,表明在目前技术条件下,可以实现量程约5g,精度为10-5g的悬浮微加速度计。设计并加工出一种圆环形结构的敏感元件,已实现了Z轴方向的静电悬浮及加速度测量,证明设计方案是可行的,进一步研究可实现三轴悬浮加速度计。
A micro-mechanical accelerometer based on electrostatic levitation principle is designed. It uses a sandwich structure of the micro-sensitive components, capacitive displacement detection program and electrostatic suspension control program. The main structural design of sensitive components, the selection of parameters, the calculation of supporting electrostatic force, the limits of measuring range and the limits of accuracy are emphatically analyzed. It shows that under the current technical conditions, the measuring range of about 5g and the precision of 10-5g can be achieved. Micro-accelerometer. Design and processing of a ring-shaped structure of the sensing element has been achieved in the Z-axis electrostatic levitation and acceleration measurements to prove that the design is feasible, further research can achieve three-axis suspension accelerometer.