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A method of switching between two pumping paths(SPP)[1] has been used to measure the outgassing rate of stainless steel(316L)accurately. First,the outgassing rate of the tubes of the gauge and the quadrupole mass spectrometer that is included in the measured value can be subtracted from the measured value. Second,the calculated value needs only one vacuum gauge reading essentially. It can avoid the individual differences of gauges skillfully by the design. Schematic diagram of the SPP method is shown in Fig.1 and test device of the outgassing rate is shown in Fig.2.
A method of switching between two tubes paths (SPP) [1] has been used to measure the outgassing rate of stainless steel (316L) accurately. First, the outgassing rate of the tubes of the gauge and the quadrupole mass spectrometer that is included in Second, the calculated value needs only one vacuum gauge reading essentially. It can avoid the individual differences of gauges skillfully by the design. Schematic diagram of the SPP method is shown in Fig.1 and test device of the outgassing rate is shown in Fig. 2.