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研究了超声清洗和激光预处理两种后处理手段对减反膜的损伤特性的影响。采用电子束蒸发技术制备了1 064 nm减反膜,利用超声清洗及激光预处理的方法分别对样品进行处理,并对处理前后的样品分别进行激光损伤阈值测试及破斑深度测量。结果表明:处理后减反膜的损伤阈值均有所提升,但激光预处理的阈值增强效果更加明显;超声清洗前后的破斑深度没有大的变化,而激光预处理后的破斑深度比处理前浅得多;原因在于超声清洗只能去除表面杂质,激光预处理可减少和抑制膜层内较深处的缺陷。
The effects of ultrasonic cleaning and laser pretreatment on the damage properties of anti-reflection film were studied. The 1 064 nm anti-reflection film was prepared by electron beam evaporation. The samples were treated by ultrasonic cleaning and laser pretreatment respectively. The laser damage threshold and the depth of spotting were measured respectively before and after treatment. The results showed that the damage threshold of anti-reflection film increased after laser treatment, but the threshold enhancement effect of laser pretreatment was more obvious. There was no significant change of spot depth before and after ultrasonic cleaning. However, The former is much shallower; the reason is that ultrasonic cleaning can only remove surface impurities, laser pretreatment can reduce and inhibit the deeper defects within the film.