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对影响变栅距光栅角位移传感器分辨率的因素进行了分析研究。推导出传感器分辨率的计算公式,并讨论了传感器分辨率与各参量之间的关系及提高分辨率的方法。针对衍射级次对分辨率的影响进行了理论分析和验证。证明了变栅距光栅角位移传感器分辨率与光栅栅距的定量变化关系并进行了仿真验证。为变栅距光栅角位移传感器设计优化提供了理论指导和计算方法。
The factors influencing the resolution of variable grating angular displacement sensor are analyzed and studied. The calculation formula of sensor resolution is deduced. The relationship between sensor resolution and each parameter and the method to improve the resolution are discussed. The influence of diffraction order on the resolution is analyzed and verified theoretically. The quantitative relationship between the resolution of grating angle sensor and the grating pitch is demonstrated and verified by simulation. It provides theoretical guidance and calculation method for the design optimization of variable grating angular displacement sensor.