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精密设备中,例如大规模集成电路制版设备图形发生器、精缩机等,需要高精度移动工作台。其运动导向精度为:在100毫米行程内的偏差不大于1微米。如采用机械导轨的话,加工复杂,成本较高,难免低速爬行和高速振动,长时间使用磨损后恢复精度困难。中国科学院自动化研究所最近研制成功的一种液体静压导轨高精度工作台,用一般加工方法获得高精度导向运动,消除了爬行和振动现象,经试验鉴定,达到国内先进水平,准备用于图形发生器。本文介绍该工作台的性能、结构及液压原理、主要结构设计、参数选择与计算。文中针对特定的进出油路形式推荐了薄膜节流器膜片变形和膜片厚度的计算公式。最后介绍试验结果。
Precision equipment, such as large-scale integrated circuit plate-making equipment, graphic generators, sizing machines, etc., require high-precision mobile workbench. The motion-oriented accuracy of: 100 mm stroke within the deviation of not more than 1 micron. Such as the use of mechanical guide rails, the processing complex, high cost, inevitable slow crawling and high-speed vibration, prolonged use of wear recovery accuracy difficult. Institute of Automation, Chinese Academy of Sciences recently successfully developed a hydrostatic rail high-precision table, with the general processing methods to obtain high-precision guided motion, eliminating the phenomenon of crawling and vibration, the test identified to the advanced domestic level, ready for graphics generator. This article describes the workbench performance, structure and hydraulic principles, the main structure design, parameter selection and calculation. In this paper, the formulas for calculating diaphragm deformation and diaphragm thickness are recommended for the specific form of oil inlet and outlet. Finally introduce the test result.