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纳米球刻蚀技术和磁控溅射方法在普通玻璃衬底上制备有序氧化锌(ZnO)纳米阵列。利用扫描电子显微镜对样品表面形貌进行了观测,并对样品进行荧光(PL)光谱测试。结果表明,相比于普通ZnO薄膜,ZnO纳米阵列的有序结构可以提高在紫外区域的发光性能,减少蓝绿光的发射缺陷。研究了不同ZnO纳米阵列粒径大小和不同ZnO纳米阵列的厚度对其光学性质的影响。溅射时间30min的有序ZnO纳米阵列样品的质量和结晶状态较好,随着聚苯乙烯(PS)纳米球粒径的减小,样品吸收峰和荧光光谱均发生“蓝移”。
Nanocrystalline ball milling and magnetron sputtering were used to prepare ordered ZnO nanowire arrays on a common glass substrate. The surface morphology of the samples was observed by scanning electron microscopy, and the samples were tested by fluorescence (PL) spectroscopy. The results show that compared with the normal ZnO films, the ordered structure of ZnO nano-arrays can improve the luminescence properties in the ultraviolet region and reduce the emission defects of blue-green light. The effects of the size of different ZnO nano-arrays and the thickness of different ZnO nano-arrays on their optical properties were studied. The quality and crystallinity of the ordered ZnO nanoarray samples sputtered at 30 min were good, and the “blue shift” was observed both in the absorption and fluorescence spectra of the polystyrene (PS) nanoparticles.