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微电子 ,集成电路的水平是国家地位和综合国力的重要标志。集成电路集成度的增长离不开生产和制作集成电路的光刻设备。本文重点介绍集成电路的制造技术的制作设备的最新发展状况 ,提出发展我国微电子光刻技术的建议。
Microelectronics, integrated circuit level is an important symbol of national status and overall national strength. The growth of integrated circuit integration is inseparable from the lithography equipment for the production and fabrication of integrated circuits. This article focuses on the latest development of manufacturing equipment for integrated circuit manufacturing and puts forward suggestions for developing microelectronics lithography in China.