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采用电弧增强磁控溅射(AEMS)技术在钛表面制备纳米复合Si-C-N超硬薄膜,研究薄膜的显微结构、相组成、硬度、韧性、摩擦学行为和耐蚀性能。结果表明,薄膜形成了C–C、C=C、N–C以及Si–C非晶复合组织结构。薄膜的硬度为(38.2±4.1)GPa,断裂韧性为(3.68±0.32)MPa·m1/2。薄膜的摩擦系数为0.23左右,具有良好的抗摩擦磨损能力。沉积Si-C-N薄膜的TA2试样在25℃、3.5%NaCl水溶液中的腐蚀速率为0.000125mm·a-1,是纯TA2的12.5%,具有良好的耐蚀性能。
The nano-composite Si-C-N superhard films were prepared on the surface of titanium by arc-enhanced magnetron sputtering (AEMS) technology. The microstructure, phase composition, hardness, toughness, tribological behavior and corrosion resistance of the films were studied. The results show that the films formed C-C, C = C, N-C and Si-C amorphous composite structure. The hardness of the film was (38.2 ± 4.1) GPa and the fracture toughness was (3.68 ± 0.32) MPa · m1 / 2. Film friction coefficient of about 0.23, with good anti-friction and wear resistance. The corrosion rate of TA2 deposited on Si-C-N thin film is 0.000125mm · a-1 in 25 ℃, 3.5% NaCl aqueous solution, which is 12.5% of pure TA2 and has good corrosion resistance.