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微电子技术是近半个世纪以来得到迅猛发展的一门高科技应用性学科,是信息产业的先导和基石,被誉为现代电子工业的心脏和高科技的原动力。微电子技术的强大生命力在于它可以低成本、大批量地生产出具有高可靠性和高精度的微电子结构模块。这种技术与其它学科相结合,会诞生出一系列崭新的学科和重大的经济增长点,作为与微电子技术成功结合的典型例子便是MEMS(微机电系统)技术和DNA生物芯片等目前,微电子技术已经成为衡量一个国家科学技术和综合国力的重要标志。微电子技术的发展方向是高集成、高速度、低功耗和智能化。随着集成电路的深亚微米制造技术和设计技术的迅速发展,21世纪的微电子技术将从目前的3G时代逐步发展到3T时代(即存储容量由G位发展到T位、集成电路器件的速度由GHz发展到THz、数据传输速率由Gbps发展到Tbps)
Microelectronics technology is a high-tech applied discipline developed rapidly in recent half a century. It is the forerunner and cornerstone of information industry and is regarded as the driving force behind the heart and high technology of modern electronic industry. The strong vitality of microelectronics is that it can produce microelectronic structural modules with high reliability and high precision in large quantities at low cost. This technology, combined with other disciplines, will produce a series of brand new disciplines and major economic growth points. Typical examples of successful integration with microelectronic technology are MEMS (Micro Electro Mechanical Systems) technology and DNA biochips. At present, Microelectronics technology has become an important indicator of a country’s science and technology and overall national strength. The direction of the development of microelectronics technology is highly integrated, high speed, low power consumption and intelligent. With the rapid development of IC deep-submicron manufacturing technology and design technology, the 21st century will gradually develop from the current 3G era to the 3T era (that is, the storage capacity will evolve from G bit to T bit, and the integrated circuit device Speed from GHz to THz, data transfer rate from Gbps to Tbps)