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光栅刻划机工作台性能及其控制算法是直接影响大面积光栅刻划精度的重要原因。为了提高光栅刻划机运行精度,研制了采用压电陶瓷进行微定位控制的300mm行程宏微两级工作台,建立了微定位工作台数学模型,仿真分析了工作台参数对系统动态性能的影响。采用反向传播(BP)神经网络比例-积分-微分(PID)算法对微定位工作台进行闭环控制。仿真分析表明通过增大内外台连接刚度或内外台之间阻尼在总体趋势上均可改善与光栅质量密切相关的微定位工作台动态性能。工作台定位实验表明,在以双频激光干涉仪为纳米位移测量基准的情况下,进行刻线密度为35line/mm以上常用光栅空运刻划时,BP神经网络PID算法可实现宏微两级工作台定位误差3σ值不大于5.0nm。以上研究为大尺寸光栅刻划机宏微两级工作台结构设计及控制算法的选择提供了理论及技术指导。
Raster scoring machine table performance and its control algorithm is a direct impact on the accuracy of large-scale grating engraving an important reason. In order to improve the operation precision of raster scribing machine, a macro-micro two-stage workbench with micro-positioning controlled by piezoelectric ceramics was developed. The mathematical model of micro-positioning worktable was established. The influence of worktable parameters on the dynamic performance of the system was analyzed . Backpropagation (BP) neural network proportional-integral-derivative (PID) algorithm is used to control the micro-positioning stage. The simulation results show that the dynamic performance of the micro-positioning table, which is closely related to the grating quality, can be improved by increasing the connection stiffness of the inner and outer platforms or the damping between the inner and outer platforms. Workbench positioning experiments show that in the dual-frequency laser interferometer for the nano-displacement measurement standards, the engraved density of 35line / mm or more commonly used raster air scoring, BP neural network PID algorithm can achieve macro and micro two levels of work Taiwan positioning error 3σ value is not greater than 5.0nm. The above research provides theoretical and technical guidance for the design of macro-micro two-stage workbench and the selection of control algorithm for large-scale grating sculler.