For the purpose of solving the problem that too large pole tip recession (PTR) is produced in magnetic rigid disk beads by mechanical polishing,a chemical mechanical nano-grinding experiment is performed by using a float-piece polisher with a tin plate to achieve a more plane and smoother surface. A basal solution, addition agents and a range of pH value are suitably selected to find a kind of slurry, with which the PTR can be controlled on sub-nanometer scale and the giant magnetic resistance (GMR) corrosion and electrostatic damage (ESD) can be avoided. Moreover, the cause that TiC protrudes from the substrate surface of the heads is studied. The appropriate shape and size of diamond abrasive are selected according to the chemical activation of Al_2O_3 and TiC in the same slurry. In this way, the chemical and mechanical interactions are optimized and the optimal surface that has small PTR and TiC asperity is achieved. Ultimatily, the chemical mechanical nano-grinding in combination with mechanical nano-grinding is adopted. Sub-nanometer PTR is achieved and the TiC asperity is eliminated by the chemical mechanical nano-grinding with large size of monocrystalline followed by mechanical nano-grinding with smalle polycrystalline diamonds. For the purpose of solving the problem that too large pole tip recession (PTR) is produced in magnetic rigid disk beads by mechanical polishing, a chemical mechanical nano-grinding experiment is performed by using a float-piece polisher with a tin plate to achieve a more basal and smoother surface. A basal solution, addition agents and a range of pH value are suitably selected to find a kind of slurry, with which the PTR can be controlled on sub-nanometer scale and the giant magnetic resistance (GMR) corrosion and The appropriate shape and size of diamond abrasive are selected according to the chemical activation of Al 2 O 3 and TiC in the same slurry. In this way, the chemical and mechanical interactions are optimized and the optimal surface that has small PTR and TiC asperity is achieved. Ultimatily, the chemical mechanical nano-grinding in combination w ith mechanical nano-grinding is adopted. Sub-nanometer PTR is achieved and the TiC asperity is eliminated by the chemical mechanical nano-grinding with large size of monocrystalline followed by mechanical nano-grinding with smalle polycrystalline diamonds.