【摘 要】
：
详细研究了温度和Al组分与AlxGa1-xAs横向氧化速率的关系,通过分析氧化机制和实验得到的氧化宽度与时间的线性关系,指出在较短时间内的氧化为受AlxGa1-xAs材料与水汽反应速率
【机 构】
：
北京工业大学电子信息和控制工程学院北京市光电子技术实验室,北京工业大学电子信息和控制工程学院北京市光电子技术实验室,北京工业大学电子信息和控制工程学院北京市光电子技术实验室,北京工业大学电子信息和控制
论文部分内容阅读
详细研究了温度和Al组分与AlxGa1-xAs横向氧化速率的关系,通过分析氧化机制和实验得到的氧化宽度与时间的线性关系,指出在较短时间内的氧化为受AlxGa1-xAs材料与水汽反应速率限制的过程。运用优化的氧化条件,成功制备了氧化孔径为8μm的垂直腔面发射激光器,最大直流光输出功率为3.2mW,激射波长为978nm,工作电流为15mA。
The relationship between temperature and Al composition and the lateral oxidation rate of AlxGa1-xAs was investigated in detail. By analyzing the oxidation mechanism and the linear relationship between the experimental oxidation width and time, it was pointed out that the oxidation in a short time is controlled by the AlxGa1- Reaction rate limiting process. A vertical cavity surface emitting laser with an aperture of 8μm was successfully fabricated by using optimized oxidation conditions. The maximum DC output power was 3.2mW, the lasing wavelength was 978nm and the operating current was 15mA.
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