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采用直流/射频磁控溅射方法和不连续多层交替沉积工艺,制备了CoFeB/MgO系列纳米不连续多层薄膜,研究了微波频段下的电磁性能.结果表明,通过调整CoFeB合金相和MgO介质相的相对含量可有效调控薄膜的微结构和电磁性能,且在[Co64Fe24B12(0.7 nm)/MgO(0.4 nm)]40薄膜中获得了优良的微波软磁性能和高电阻率,其饱和磁化强度1.3 T,难轴矫顽力130 A/m,电阻率3.4 mΩ.cm,且共振频率高达2.1 GHz,磁导率实部μ′和虚部μ″在1.59 GHz处均高于240,并且在0.9—2 GHz宽频带范围同时大于100.该薄膜可用于微波吸收材料和电磁兼容的设计中.
The CoFeB / MgO series of nano-discontinuous multilayer films were prepared by DC / RF magnetron sputtering and discontinuous multi-layer alternating deposition.The electromagnetic properties under microwave frequency band were studied.The results show that by adjusting the CoFeB alloy phase and MgO The relative content of the dielectric phase can effectively control the microstructure and electromagnetic properties of the film, and excellent microwave soft magnetic properties and high resistivity are obtained in the [Co64Fe24B12 (0.7 nm) / MgO (0.4 nm)] 40 film. The saturation magnetization An intensity of 1.3 T, a hard axis coercive force of 130 A / m, a resistivity of 3.4 mΩ.cm, and a resonance frequency of up to 2.1 GHz, the real part μ ’and the imaginary part μ "of the permeability both above 240 at 1.59 GHz, In the 0.9-2 GHz wideband range at the same time greater than 100. The film can be used for microwave absorbing materials and electromagnetic compatibility design.