论文部分内容阅读
采用高性能Tb0 .3 Dy0 .7Fe2 单晶材料 ,通过优化微位移致动器的机械、磁路参数 ,研制出了具有非水冷结构的新型微位移致动器。致动器的最大线性工作区间为 0 .5～ 3 5 .5 μm ,工作电压为 2～ 2 4V ,饱和驱动量可达 3 9.5 μm
By using the high performance Tb0.3 Dy0.7Fe2 single crystal material, a new type of micro-displacement actuator with non-water cooling structure was developed by optimizing the mechanical and magnetic circuit parameters of the micro-displacement actuator. The maximum linear actuator operating range of 0.5 ~ 3.55 μm, the operating voltage of 2 ~ 2 4V, saturated drive up to 3 9.5 μm