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1987年,我校从荷兰飞利浦公司引进一台CM12/STEM多功能新型透射电子显微镜,12月在测试中心安装完毕。该型电镜是目前我国引进最先进的分析型电镜。主要性能指标:加速电压20—120kY,放大倍数35x—820kx,透射电子图象线分辨率0.20nm(2A),点分辨率0.34nm,最小探针尺寸2nm,最小焦斑尺寸5nm,明/暗场扫描透射图象分辨率1.5nm,二次电子图象分辨率2.5nm,背散射图象分辨率4nm。
In 1987, our school imported a new CM12 / STEM multi-functional transmission electron microscope from Philips company in the Netherlands, and installed it in the test center in December. This type of electron microscope is currently the most advanced analytical electron microscope in our country. The main performance indicators: acceleration voltage 20-120kY, magnification 35x-820kx, transmission electron image line resolution of 0.20nm (2A), the dot resolution of 0.34nm, the minimum probe size of 2nm, the smallest focal spot size of 5nm, light / dark Field scanning transmission image resolution of 1.5nm, secondary electron image resolution of 2.5nm, backscattered image resolution of 4nm.