设计并研制了用于母盘刻录机的高精密运动工作台及其控制系统。工作台控制系统采用线光栅作为工作台位移检测工具。采用数字位置环和模拟电流环组成双闭环随动系统,其中位置控制器是带有速度前馈和加速度前馈的数字PID伺服滤波器。实验结果表明,该系统可以满足母盘刻录机的要求。 Designed and developed a high-precision motion table and its control system for the master disc burner. Workbench control system uses line grating as a bench displacement detection tool. The digital position loop and the analog current loop form a double loop servo system. The position controller is a digital PID servo filter with speed feedforward and acceleration feedforward. Experimental results show that the system can meet the requirements of mastering recorder.