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在对光学元件面形进行检测和光学系统成像质量的评价中,移相干涉测量技术有着广泛地应用。但是,光学干涉仪的测量精度对环境的要求非常苛刻,环境的振动和空气的扰动会对测量结果产生很大影响。提高移相干涉仪的抗振性很有必要,受到广泛重视。国际上移相干涉仪的抗振技术主要包括主动抗振和被动抗振两方面,两种技术具有各自特点。
In the optical surface detection and optical imaging system to assess the quality of phase-shifting interferometry has been widely used. However, the measurement accuracy of the optical interferometer is very harsh on the environment. The vibration of the environment and the disturbance of the air have a great influence on the measurement result. It is necessary to improve the anti-vibration performance of the phase-shifting interferometer, which has received extensive attention. The anti-vibration technology of the international phase-shifting interferometer mainly includes two aspects: active anti-vibration and passive anti-vibration. Both technologies have their own characteristics.