论文部分内容阅读
设计和制备了一种用于1064nm分振幅光偏振测量仪(DOAP)的具有多层介质薄膜结构的差分相移分束镜。通过理论分析该DOAP系统的仪器矩阵参数,得到分束镜的最优参数,并用离子束溅射沉积方法制备了分束镜样品及其背面的减反射膜,其实测结果与设计值吻合较好。与单层薄膜分束镜相比,多层介质薄膜分束镜不受基板、膜层材料,以及入射角和工作波长的限制,具有更广泛的应用。
A differential phase-shift beamsplitter with multi-layer dielectric thin film structure for 1064 nm polarization amplitude polarimeter (DOAP) was designed and fabricated. By analyzing the instrument matrix parameters of the DOAP system theoretically, the optimum parameters of the beam splitter are obtained. The beamsplitter samples and the antireflection coatings on the backside are prepared by ion beam sputtering deposition method. The measured results agree well with the designed values . Compared with the single-layer thin-film beam splitter, the multi-layer dielectric thin-film beam splitter is more widely used without being limited by the substrate, the film material, the incident angle and the working wavelength.