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介绍了一种以MEMS技术制作的可定量获取三维接触力信息的 4× 8阵列触觉传感器的结构与工艺 ,提出一种新颖的三维接触力信息的获取与处理方法 ,并给出了实现接触、分布压、接触总力、滑动状态等多种功能的实验结果和主要的技术指标。
This paper introduces the structure and technology of a 4 × 8 array tactile sensor based on MEMS technology, which can quantitatively acquire three-dimensional contact force information. A novel method to acquire and process 3D contact force information is proposed. Distribution pressure, contact force, sliding state and other functions of the experimental results and the main technical indicators.