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Ti+ (10 0kV ,3× 10 17cm- 2 )注入H13钢 ,表面注入层的化学组成和微观结构发生了很大的变化。俄歇分析表明 ,注入元素Ti在钢表面层的剖面浓度分布呈近似高斯分布 ,在 4 0nm处Ti的浓度达到最大值。离子束真空碳化导致在钢的表面形成一层约 2 0nm的“富碳层”。透射电镜分析表明 ,表面层的微观形貌由注入前的板条状马氏体结构转变成注入后的微胞状结构。电子衍射则证实 ,表面注入层已出现非晶化 ,并且有约 5nm的TiC颗粒析出。摩擦磨损实验进一步表明 ,注入后钢的摩擦系数降低 70 % ,磨损率降低 98%。
Ti + (10 0kV, 3 × 10 17cm-2) was injected into H13 steel, and the chemical composition and microstructure of the surface injection layer changed greatly. The Auger analysis shows that the concentration profile of Ti in the steel surface layer is approximately Gaussian and the concentration of Ti reaches the maximum at 40nm. Vacuum carbonization of the ion beam results in the formation of a “carbon-rich layer” of about 20 nm on the surface of the steel. Transmission electron microscopy analysis showed that the microstructure of the surface layer was changed from the lath martensitic structure before injection to the microcellular structure after injection. Electron diffraction confirmed that the surface injection layer had become amorphized and about 5 nm of TiC particles were precipitated. Friction and wear test further shows that the friction coefficient of steel after injection is reduced by 70% and the wear rate is reduced by 98%.