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[期刊论文] 作者:西田弘气,山田刚治,川添博光, 来源:材料与冶金学报 年份:2004
[期刊论文] 作者:吉田圭佑,妻鹿义治,川添博光,松野隆,山田刚治,竹内新, 来源:材料与冶金学报 年份:2004
Surface wave plasma (SWP) is a kind of low temperature plasma which can be utilized for material development. In this research, argon and oxygen were used as a...
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