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[会议论文] 作者：Buqing Xu,Shaohua Li,
来源：2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE 年份：2008
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[期刊论文] 作者：Buqing Xu,Qiang Wu,Lisong Dong,
来源：半导体学报:英文版 年份：2019
A physical model for simulating overlay metrology employing diffraction based overlay(DBO)principles is built.It can help to optimize the metrology wavelength s...
[期刊论文] 作者：Buqing Xu,Qiang Wu,Lisong Dong,Yayi Wei,
来源：半导体学报（英文版） 年份：2019
A physical model for simulating overlay metrology employing diffraction based overlay (DBO) principles is built.It can help to optimize the metrology wavelength...
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