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Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth
[期刊论文] 作者：REN Bingyan,ZHAO Long,ZHAO Xiuling,WANG Huixian,CAO Zhongqian,ZHU Huimin,FU Hongbo,
来源：稀有金属（英文版） 年份：2006
φ200 mm silicon single crystals were grown in the φ450 mm hot zone of a Czochralski (CZ) face. By modifying the patt and the velocity of the argon flow, the s...
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