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Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
[期刊论文] 作者：LIXin,TANGZhen-an,DENGXin-lu,S,
来源：武汉理工大学学报：材料科学英文版 年份：2004
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Plasma enhanced chemical vapor deposition (...
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