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[期刊论文] 作者:DING Wen-ge YU Wei ZHANG Jiang,
来源:中国航空学报:英文版 年份:2006
The hydrogenated amorphous silicon nitride (SiNx) thin films embedded with nano-structural silicon were prepared and the micro-structures at the interface of si...
Characteristics of Disorder and Defect in Hydrogenated Amorphous Silicon Nitride Thin Films Containi
[期刊论文] 作者:DING Wen-ge,YU Wei,ZHANG Jiang,
来源:中国航空学报(英文版) 年份:2004
The hydrogenated amorphous silicon nitride (SiNx) thin films embedded with nano-structural silicon were prepared and the microstructures at the interface of sil...
[期刊论文] 作者:FU Guang-Sheng,DING Wen-Ge,SONG Wei-Cai,ZHANG Jiang-Yong,YU Wei,
来源:中国物理快报(英文版) 年份:2006
Microstructure modification of silicon nanograins embedded in silicon nitride films by introducing hydrogen reactant in the plasma enhanced chemical vapour depo...
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