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[期刊论文] 作者:Chandreswar Mahata,Hassan Algadi,Muhammad Ismail,Daewoong Kwon,Sungjun Kim, 来源:材料科学技术(英文版) 年份:2021
Atomic layer deposition technique has been used to prepare tantalum nitride nanoparticles (TaN-NPs)and sandwiched between Al-doped HfO2 layers to achieve ITO/HfAlO/TaN-NP/HfAlO/ITO RRAM device.Transmission electron microscopy along with ene......
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