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[期刊论文] 作者：Mizue MUNEKATA,Akira NOGUCHI,Jun NISHIYAMA,Hiroaki KURISHIMA,Hiroyuki YOSHIKAWA,,
来源：Journal of Thermal Science 年份：2012
Scattering characteristics of liquid droplets spun off from a rotating disk edge are experimentally investigated. In the present research, aluminum disks are ut...
Influences of the Exhaust Flow on the Boundary Layer Flow on the Wafer Surface in Spin Coating Syste
[期刊论文] 作者：Seiichi KIMURA,Mizue MUNEKATA,Hiroaki KURISHIMA,Kazuyoshi MATSUZAKI,Hideki OHBA,
来源：Journal of Thermal Science 年份：2005
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconduct...
[期刊论文] 作者：Mizue MUNEKATA,Jun NISHIYAMA,Akira NOGUCHI,Hiroaki KURISHIMA,Hiroyuki YOSHIKAWA,Hideki OHBA,,
来源：Journal of Thermal Science 年份：2004
Recently,development of high technology has been required for the formation of uniform thin film in manufacturing processes of semiconductor as the precision in...
[期刊论文] 作者：Mizue MUNEKATA,Seiichi KIMURA,Hiroaki KURISHIMA,Jinsuke TANAKA,Sohei YAMAMOTO,Hiroyuki YOSHIKAWA,Kazuyoshi,
来源：Journal of Thermal Science 年份：2008
Recently,development of high technology has been required for the formation of thin uniform film in manufac- turing processes of semiconductor as the semicondu...
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