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[期刊论文] 作者:CHENG Xiang,CHEN Chao,CAI Jia-fa,LIU Tie-lin, 来源:城市道桥与防洪 年份:2004
Amorphous carbon (a-C) films and amorphous carbon films incorporating with the nitrogen (a-C∶N) were deposited on silicon substrates in a radio-frequency drive...
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