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[期刊论文] 作者：JunmingAn,JianLi,DingshanGao,JunleiXia,JianguangLi,HongjieWang,XiongweiHu,
来源：ChineseOpticsLetters 年份：2004
A new fabrication technology for three-dimensionally buried silica on silicon optical waveguide based on deep etching and thermal oxidation is presented. Using this method, a silicon layer is left at the side of waveguide. The stress distri......
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