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Low-temperature growth of stoichiometric aluminum nitride films prepared by magnetic-filtered cathod
[期刊论文] 作者：Wan-Qi Qiu,Zhong-Wu Liu,Ke-Song Zhou,,
来源：Rare Metals 年份：2016
AlN films were prepared on Si(100) and quartz glass substrates with high deposition rate of 30 nm·min~(-1) at the temperature of below 85℃ by the magnetic-fil...
[会议论文] 作者：Chen SONG,Jing WEN,Shao-peng NIU,Tai-kai LIU,Ya-peng ZHANG,Min LIU,Ke-song ZHOU,
来源：2019第二十次全国电化学大会 年份：2019
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[期刊论文] 作者：Lin DONG,Mei-Jun LIU,Xiao-Feng ZHANG,Xue-Shi ZHUO,Jia-Feng FAN,Guan-Jun YANG,Ke-Song ZHOU,
来源：先进陶瓷（英文版） 年份：2022
Environmental barrier coatings(EBCs)effectively protect the ceramic matrix composites(CMCs)from harsh engine environments,especially steam and molten salts.However,open pores inevitably formed during the deposition process provide the trans......
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