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[期刊论文] 作者：LiangjinGe,XudiWang,HuoyaoChen,KeqiangQiu,ShaojunFu,
来源：ChineseOpticsLetters 年份：2012
We present a replication process, named reversal soft ultraviolet (UV) nanoimprint, to fabricate a high-aspect-ratio flexible subwavelength grating (SWG) on a polyurethane acrylate (PUA). This nanopatterning technique consists of casting, r......
Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffr
[期刊论文] 作者：sebier,ZhengkunLiu,KeqiangQiu,YingLiu,Ernst-BernhardKley,XiangdongXu,YilinHong,andShaojunFu,
来源：ChineseOpticsLetters 年份：2016
Near-field holography (NFH), with its virtues of precise critical dimensions and high throughput, has a great potential for the realization of soft x-ray diffraction gratings. We show that NFH with reflections reduced by the integration of ......
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