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[期刊论文] 作者:MingZhang,ChangNi,YuZhu,LeijieWang,ChuxiongHu,JinchunHu,
来源:ChineseOpticsLetters 年份:2017
A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase-modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating d......
[期刊论文] 作者:YuZhu,LeijieWang,MingZhang,SenLu,KaimingYang,andChuxiongHu,
来源:ChineseOpticsLetters 年份:2016
We present a novel homodyne frequency-shifting interference pattern locking system to enhance the exposure contrast of interference lithography and scanning beam interference lithography (SBIL). The novel interference pattern locking system......
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