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Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-sh
[期刊论文] 作者：David R Myers,Kan Bun Cheng,Babak Jamshidi,Robert G Azevedo,Debbie G Senesky,Mehran Mehregany,Muthu B,
来源：Engineering Sciences 年份：2012
We present the fabrication and testing of a silicon carbide(SiC)balanced mass double-ended tuning fork that survives harsh environments without compromising the...
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