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[期刊论文] 作者：R. Navamathavan,Soo,
来源：纳微快报：英文版 年份：2014
Electrospinning is a highly versatile technique to prepare continuous fibers with diameters of the order of nanometers. The remarkable high aspect ratio and hig...
Structural and Electrical Properties of the Low-k SiOC(-H) Film Prepared with Plasma-Enhanced Atomic
[会议论文] 作者：R. Navamathavan,Chi Kyu Choi,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
SiOC(-H) thin films with low-dielectric-constant have been prepared by using plasma-enhanced atomic layer deposition.I-V and C-V characteristics of the SiOC(-H) films were measured for the meatal-insu...
Effects of the UV Treated SiCN Capping Layer on the SiOC(-H) Film Prepared by Plasma-Enhanced Atomic
[会议论文] 作者：R. Navamathavan,Chi Kyu Choi,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Multilevel interconnection structures comprising of low-k films with inlaid copper wires in a dual damascene process have been identified as the new generation technology in the National Technology Ro...
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