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[期刊论文] 作者:Dao-Huan Feng,Ruo-Bing Wang,Ao-Xue Xu,Fan Xu,Wei-Lei Wang,Wei-Li Liu,Zhi-Tang Song, 来源:中国物理B(英文版) 年份:2021
During the preparation of the phase change memory,the deposition and chemical mechanical polishing(CMP)of titanium nitride(TiN)are indispensable.A new acidic sl...
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