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[期刊论文] 作者:CHEN Long-long,SHI Ji-feng,LI, 来源:上海大学学报(英文版) 年份:2011
Amorphous InGaZnO (a-IGZO) film is deposited on the glass substrate by radio-frequency sputtering and the influence of annealing on wet etch of a-IGZO films wer...
[期刊论文] 作者:SHI Ji-feng,CHEN Long-long,LI, 来源:上海大学学报(英文版) 年份:2004
Amorphous InGaZnO (a-IGZO) films were deposited on the corning eagle XG (EXG) glass substrates using magnetron sputtering method.The structure,surface morpholog...
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