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Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
[期刊论文] 作者：LI Xin,TANG Zhen-an,DENG Xin-l,
来源：武汉理工大学学报英 年份：2004
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Plasma enhanced chemical vapor deposition (...
Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
[期刊论文] 作者：LI Xin,TANG Zhen-an,DENG Xin-l,
来源：武汉理工大学学报(材料科学版)英 年份：2004
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Plasma enhanced chemical vapor deposition (...
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