搜索筛选:
搜索耗时0.0880秒,为你在为你在102,285,761篇论文里面共找到 1 篇相符的论文内容
发布年度:
Preparation and Characterization of DLC Films by Twinned ECR Microwave Plasma Enhanced CVD for Micro
[期刊论文] 作者:LIXin,TANGZhen-an,DENGXin-lu,S,
来源:武汉理工大学学报:材料科学英文版 年份:2004
Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear.Plasma enhanced chemical vapor deposition (...
相关搜索: