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Influence of Sputter Deposition Time on the Growth of c-Axis Oriented AlN/Si Thin Films for Microele
[期刊论文] 作者：V. VasanthiPillay,K. Vijayalak,
来源：矿物质和材料特性和工程(英文) 年份：2012
Aluminum Nitride films were grown on and Si (100) substrate by D.C. reactive magnetron sputtering at room temperature. Influence of sputter deposition time on p...
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