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[期刊论文] 作者：Xianqiang Zheng,Xu Ma,Shengen,
来源：微电子制造学报 年份：2020
Computational lithography(CL)has become an indispensable technology to improve imaging resolution and fidelity of deep sub-wavelength lithography.The state-of-t...
[期刊论文] 作者：Xianqiang Zheng,Yanlong Shen,Shitao Wang,Ke Huang,Dapeng Cao,
来源：中国化学工程学报（英文版） 年份：2021
Sulfur hexafluoride (SF6) is an extremely severe greenhouse gas.It is an urgently important mission to find excellent candidates for selective adsorption of SF6,in order to reduce the emission of SF6 facilities.Here,we adopt the molecular s......
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