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[会议论文] 作者:Yanyan Zhao,Xiuling Li,Jingyu Yan,Xinmiao Liang,Yukui Zhang,
来源:The 24th International Symposium on Microscale Bioseparation 年份:2009
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Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth
[期刊论文] 作者:REN Bingyan,ZHAO Long,ZHAO Xiuling,WANG Huixian,CAO Zhongqian,ZHU Huimin,FU Hongbo,
来源:稀有金属(英文版) 年份:2006
φ200 mm silicon single crystals were grown in the φ450 mm hot zone of a Czochralski (CZ) face. By modifying the patt and the velocity of the argon flow, the s...
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