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[期刊论文] 作者：Zhi-Jie Jiao,Chun-Yu He,Zhong,
来源：哈尔滨工业大学学报：英文版 年份：2013
Research works on width compensation and correction were carried out in order to eliminate the effects of the PVPC( plan view pattern control) on width accuracy...
[期刊论文] 作者：Zhi-Jie Jiao,Chun-Yu He,Zhong Zhao,Jing-Guo Ding,,
来源：Journal of Harbin Institute of Technology 年份：2013
Research works on width compensation and correction were carried out in order to eliminate the effects of the PVPC( plan view pattern control) on width accuracy...
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