Here,we designed a broadband,low loss,compact,and fabrication-tolerant silicon-based four-mode edge coupler,com-posed of......

Here, we designed a broadband, low loss, compact, and fabrication-tolerant silicon-based four-mode edge coupler, compose......

提出了一种与CMOS工艺兼容、高响应率、低噪声的微机械热电堆红外探测器。该结构热电偶数目为两对，材料为P／N型多晶硅，吸收层材料为Ti......