Structural un-uniformity and electrical anisotropy of μc-Si∶H film are investigated in this paper. It is found that th......

采用甚高频等离子体辅助化学气相沉积技术（VHF-PECVD）分别对薄膜沉积参数进行了功率密度-沉积气压和硅烷浓度-气体总流量两因素优化......